Ionized cluster beam technique for surface treatment.
نویسندگان
چکیده
منابع مشابه
Simulation of Fabrication toward High Quality Thin Films for Robotic Applications by Ionized Cluster Beam Deposition
The most commonly used method for the production of thin films is based on deposition of atoms or molecules onto a solid surface. One of the suitable method is to produce high quality metallic, semiconductor and organic thin film is Ionized cluster beam deposition (ICBD), which are used in electronic, robotic, optical, optoelectronic devices. Many important factors such as cluster size, cluster...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1989
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.55.260